Date of Award

1-1-2008

Document Type

Thesis

Degree Name

M.S.

Department

Electrical Engineering

First Advisor

Matin M. A.

Second Advisor

Yunbo Yi

Keywords

Hearing aids, MEMS Transducer

Abstract

A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is

Provenance

Recieved from ProQuest

Rights holder

Houwen Tang

File size

72 p.

File format

application/pdf

Language

en

Discipline

Electrical engineering

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