Date of Award

1-1-2008

Document Type

Masters Thesis

Degree Name

M.S.

Organizational Unit

Daniel Felix Ritchie School of Engineering and Computer Science

First Advisor

Mohamed A. Matin, Ph.D.

Second Advisor

Yun Bo Yi, Ph.D.

Third Advisor

Bob Whitman

Keywords

Hearing aids, MEMS, Transducer, Microelectromechanical systems

Abstract

A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is

Publication Statement

Copyright is held by the author. User is responsible for all copyright compliance.

Rights Holder

Houwen Tang

Provenance

Received from ProQuest

File Format

application/pdf

Language

en

File Size

72 p.

Discipline

Electrical engineering



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