Date of Award

1-1-2008

Document Type

Thesis

Degree Name

M.S.

Department

Electrical Engineering

First Advisor

Mohamed A. Matin, Ph.D.

Second Advisor

Yunbo Yi, Ph.D.

Keywords

Hearing aids, MEMS, Transducer, Microelectromechanical systems

Abstract

A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is

Publication Statement

Copyright is held by the author. User is responsible for all copyright compliance.

Provenance

Received from ProQuest

Rights holder

Houwen Tang

File size

72 p.

File format

application/pdf

Language

en

Discipline

Electrical engineering

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