Date of Award
1-1-2008
Document Type
Thesis
Degree Name
M.S.
Department
Electrical Engineering
First Advisor
Mohamed A. Matin, Ph.D.
Second Advisor
Yun Bo Yi, Ph.D.
Third Advisor
Bob Whitman
Keywords
Hearing aids, MEMS, Transducer, Microelectromechanical systems
Abstract
A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is
Publication Statement
Copyright is held by the author. User is responsible for all copyright compliance.
Recommended Citation
Tang, Houwen, "MEMS Transducer for Hearing Aid Device" (2008). Electronic Theses and Dissertations. 641.
https://digitalcommons.du.edu/etd/641
Provenance
Received from ProQuest
Rights holder
Houwen Tang
File size
72 p.
Copyright date
2008
File format
application/pdf
Language
en
Discipline
Electrical engineering